229910052710 silicon Inorganic materials 0.000 description 7.XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7.
238000004026 adhesive bonding Methods 0.000 claims description 2. 238000005859 coupling reaction Methods 0.000 claims description 5. 238000010168 coupling process Methods 0.000 claims description 5. 238000000576 coating method Methods 0.000 claims description 7. 239000011248 coating agent Substances 0.000 claims description 7. 238000005520 cutting process Methods 0.000 claims description 20. 238000004519 manufacturing process Methods 0.000 title claims description 8. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Priority claimed from US588042 external-priority Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc Publication of EP0785456A1 publication Critical patent/EP0785456A1/en Application granted granted Critical Publication of EP0785456B1 publication Critical patent/EP0785456B1/en Anticipated expiration legal-status Critical Status Expired - Lifetime legal-status Critical Current Links Original Assignee Agilent Technologies Inc Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) ( en Inventor Kok Wai Chang Long Yang Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Expired - Lifetime Application number EP97300096A Other languages German ( de) #Optical isolator chip pdf#
Google Patents Fabrication of optical isolatorsĭownload PDF Info Publication number EP0785456B1 EP0785456B1 EP97300096A EP97300096A EP0785456B1 EP 0785456 B1 EP0785456 B1 EP 0785456B1 EP 97300096 A EP97300096 A EP 97300096A EP 97300096 A EP97300096 A EP 97300096A EP 0785456 B1 EP0785456 B1 EP 0785456B1 Authority EP European Patent Office Prior art keywords optical isolator optical isolator dicing unit Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. Google Patents EP0785456B1 - Fabrication of optical isolators EP0785456B1 - Fabrication of optical isolators
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